1

Applications of plasma coatings in artificial joints: an overview

Year:
2004
Language:
english
File:
PDF, 441 KB
english, 2004
2

Development of a gate metal etch process for gallium arsenide wafers

Year:
1994
Language:
english
File:
PDF, 598 KB
english, 1994
8

Three-dimensional simulation of an isolation trench refill process

Year:
1993
Language:
english
File:
PDF, 849 KB
english, 1993
9

Numerical simulations of thin film thermal flow

Year:
1994
Language:
english
File:
PDF, 577 KB
english, 1994
10

Simulation of collimated flux distributions during physical vapor deposition

Year:
1995
Language:
english
File:
PDF, 569 KB
english, 1995
14

A method to estimate local deposition conditions using film profiles in features

Year:
1992
Language:
english
File:
PDF, 564 KB
english, 1992
17

Interpretation of hydrogen chemisorption on nickel catalysts

Year:
1986
Language:
english
File:
PDF, 1.10 MB
english, 1986
19

CONFORMALITY AND COMPOSITION OF FILMS DEPOSITED AT LOW PRESSURES

Year:
1996
Language:
english
File:
PDF, 516 KB
english, 1996
22

Two deterministic approaches to topography evolution

Year:
2007
Language:
english
File:
PDF, 241 KB
english, 2007
23

Predictive modeling of atomic layer deposition on the feature scale

Year:
2002
Language:
english
File:
PDF, 1.10 MB
english, 2002
27

Evolution of Surface Morphology During Cu(TMVS)(hfac) Sourced Copper CVD

Year:
2000
Language:
english
File:
PDF, 700 KB
english, 2000
32

Nanoplate elasticity under surface reconstruction

Year:
2005
Language:
english
File:
PDF, 697 KB
english, 2005
36

Multiscale material removal modeling of chemical mechanical polishing

Year:
2003
Language:
english
File:
PDF, 285 KB
english, 2003
37

Formation and evolution of grain structures in thin films

Year:
2004
Language:
english
File:
PDF, 439 KB
english, 2004
38

Topography simulation for the virtual wafer fab

Year:
2000
Language:
english
File:
PDF, 1.05 MB
english, 2000
40

Composition Variation Between Cu-Ni Crystallites using TEM and EDS

Year:
1987
Language:
english
File:
PDF, 741 KB
english, 1987
41

The Impact of Gas Phase and Surface Chemical Reactions on Step Coverage in Lpcvd

Year:
1993
Language:
english
File:
PDF, 2.51 MB
english, 1993
50

Multiple scale integrated modeling of deposition processes

Year:
2000
Language:
english
File:
PDF, 288 KB
english, 2000